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High Vacuum Industrial Furnace

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Vapor deposition furnace

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Product overview:

This equipment absorbs the technological development of a German company, uses intermediate frequency induction heating method, grows high-quality optical crystals by physical vapor transmission method under vacuum conditions, and can grow third-generation semiconductor materials such as silicon carbide, which can be customized according to the actual needs of customers.

The detailed information
product manual
This equipment absorbs the technological development of a German company, uses intermediate frequency induction heating method, grows high-quality optical crystals by physical vapor transmission method under vacuum conditions, and can grow third-generation semiconductor materials such as silicon carbide, which can be customized according to the actual needs of customers.
This system uses a single-chamber vertical double-layer water-cooled stainless steel structure. It consists of a furnace, a vacuum acquisition system, a vacuum measurement system, a seed rod pulling and rotating mechanism, a crucible rod pulling system, an induction heating system, and an electric control system. Its technical indicators are as follows:


Special note: For R & D personnel who purchase foreign first-class equipment for crystal growth and skilled growth technology, our company is willing to co-manufacture it with R & D, and customize production equipment according to the growth process.


Furnace body

Main hearth

Size Φ610 × 850 mm

Lifting mechanism

Rotating speed

0 ~ 30rpm

Lifting speed continuously adjustable range

0.06~6㎜/h

Fast lifting speed continuously adjustable

≥40㎜/min

Effective travel

410㎜

vacuum

Main pump

Molecular pump

Foreline pump

Oil seal pump (optional dry pump)

valve

SUS304 bellows shaft seal high valve

Ultimate vacuum

6.6×10-5Pa

System leak rate

Vacuum level ≤10Pa after stopping pump for 12 hours

Crucible transmission mechanism

Rotating speed

0~30rpmvariable frequency adjustable

Speed range

0.03~6㎜/hadjustable

Fast lifting speed continuously adjustable

≥40㎜/min

Effective travel

560㎜

Total rated power

Determine the intermediate frequency power supply according to customer needs, 50KW recommended

Area

Host + control cabinet + intermediate frequency power supply

2200×2500mm2